The stable operation of semiconductor equipment is the key to ensuring production, and precision digital thermometers play an important role in equipment fault diagnosis. When the equipment is operating normally, precision digital thermometers can monitor the temperature of key parts of the equipment in real - time and establish a temperature database for normal equipment operation. Once the equipment malfunctions, temperature is often one of the most sensitive indicators.
For example, when the temperature of a key component of a semiconductor etching machine suddenly rises and exceeds the normal range, the precision digital thermometer will quickly capture this change. By comparing and analyzing with the pre - established temperature database, technicians can preliminarily judge the possible types of equipment failures, such as component wear and tear, and cooling system failures. This temperature - data - based fault diagnosis method can help enterprises quickly locate the fault points, shorten the equipment downtime, and reduce the production losses caused by equipment failures.
At the same time, combined with big data analysis technology, by integrating and analyzing a large amount of temperature data during equipment operation, the potential fault risks of the equipment can also be predicted. Discover potential problems of the equipment in advance and take corresponding maintenance measures to achieve a transformation from passive maintenance to active maintenance, improve the reliability and service life of the equipment, and ensure the continuity and stability of semiconductor production.
